| Original document(21 pages) 中文版 |
A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate processing apparatus; a fourth step of returning the substrate after the third step to the housing case by the transport means; a second step of calculating a difference in amount in relation to a normal position of the substrate at the transport means from the first step and before the fourth step; and a fifth step of adjusting a returning position of the substrate in the housing case after the third step and until the fourth step. |
Application Number
申请号 |
200610057058 |
Application Date
申请日 |
2006.03.17 |
| Title 名称 |
Substrate processing apparatus and substrate housing method
|
Publication Number
公开号 |
1838398 |
Publication Date
公开日 |
2006.09.27 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
H01L21/677,H01L21/00 |
Applicant(s) Name
申请人 |
Olympus Corp. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
chen jian |
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