Original document(7 pages)  中文版
    This invention relates to a method for drawing sub-micron ultraviolet luminous pattern on zinc oxide film. Wherein, dissolving the ZnA, sodium citrate and sodium citrate into deionized water, adjusting pH value in 10-11; dipping a clear substrate into the solution for supersonic oscillation at 60-90Deg to deposit ZnO film on the substrate; cleaning the film to remove reacted residue and dry in air lower than 400Deg; putting the film on SEM to irradiate with focusing electric beam on the film as request. This invention has high precision with low cost and long conservation time for wide application.
Application Number
申请号		 200610049580 Application Date
申请日		 2006.02.24
Title 名称 Method for drawing sub-micron ultraviolet luminous pattern on zinc oxide film
Publication Number
公开号		 1837965 Publication Date
公开日		 2006.09.27
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G03F7/20,H01J37/00
Applicant(s) Name
申请人		 Zhejiang University
Address 地址 310027
Inventor(s) Name 发明人 Yang Deren, Xie Rongguo, Li Dongsheng
Attorney & Agent 代理人 han gemei

  
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