| Original document(66 pages) 中文版 |
An inspection method which simplifies an inspection step by eliminating the need to set probes on wiring or probe terminals, and an inspection device for performing the inspection step. A voltage is applied to each of inspected circuits or circuit elements to operate the same. Signal processing is performed on an output from each inspected circuit or circuit element during operation to form a signal (operation information signal) including information on the operating condition of the circuit or the circuit element. The operation information signal is amplified and the amplitude of an alternating current voltage separately input is modulated with the amplified operation information signal. The voltage of the modulated alternating current is read in a non-contact manner to determine whether the corresponding circuit or circuit element is non-defective or defective. |
Application Number
申请号 |
200610019813 |
Application Date
申请日 |
2002.05.15 |
| Title 名称 |
Measuring method, inspection method, inspection device for semiconductor device
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Publication Number
公开号 |
1837838 |
Publication Date
公开日 |
2006.09.27 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
G01R31/01,G01R31/26,G01R31/28,G02F1/136,G09F9/33,G09F9/35,H01L21/66 |
Applicant(s) Name
申请人 |
Semiconductor Energy Lab |
| Address 地址 |
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| Inventor(s) Name 发明人 |
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| Attorney & Agent 代理人 |
wu limeng zhang zhicheng |
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