Original document(19 pages)  中文版
    A method and apparatus for applying a coating on a substrate, wherein, opposite the substrate, at least two expanding thermal plasma (ETP) sources are arranged which provide the substrate with a coating, wherein the substrate is located in a process room in which the pressure is lower than the pressure, prevailing in the ETP sources, of a carrier gas which is introduced into the process room via the sources and which forms the expanding plasma, wherein the coating provided by each source has a layer thickness according to a certain deposition profile, for instance a Gaussian deposition profile, and wherein different process parameters are chosen such that, after the coating process, the addition of the deposition profiles results in a substantially uniform layer thickness of the coating on a relevant part of the substrate. Preferably, the distance between sources producing plasma at the same time is chosen and/or settable such that the expanding plasmas substantially do not influence each other.
Application Number
申请号
200480023150 Application Date
申请日
2004.08.12
Title 名称 Method and an apparatus for applying a coating on a substrate
Publication Number
公开号
1836060 Publication Date
公开日
2006.09.20
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23C16/513,C23C16/52
Applicant(s) Name
申请人
OTB Group BV
Address 地址
Inventor(s) Name 发明人 Bijker Martin Dinant, Bosch Roland Cornelis Maria
Attorney & Agent 代理人 yang jing fan weimin

  
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