A RF micro-electronic mechanical double-layer membrane bridge parallel condenser switch is used in RF microwave circuit, said structure uses a double end fixing strut beam as the switch membrane bridge and applies a double membrane structure to resolve the self-execution and self locking effect caused by RF high power including: a switch is installed on a GaAs substrate, a coplanar-waveguide is taken as a port of a switch, the switch bridge is part of a signal line realized by a fixed double end beam, the connection line of the coplanar-waveguide earth line is set above the signal line switch bridge, which is also the earth coupled line of the switch, a DC control electrode is below the signal line switch bridge and a SiN medium layer grows on the opposite faces of the DC electrode, earth connection line and the switch bridge, MMIC technological process is applied and polyimide is used as a sacrifice layer. |