The invention provides a frame structure differential capacity type speed-up sensor. It etches bonding needed table on the back of the silicon sheet; the glass base sheet forms a fixed block with the bonding needed table; it etches an elastic beam, a quality block and fixed and active electrode pictures, wherein the bonding block comprises upper, lower, left, right and inner bonding blocks; the upper and lower bonding blocks are connected with the elastic beam; the frame sharp quality block is between the two elastic beams; the inner side of the left and right bonding blocks and the two sides of the middle bonding block have fixed electrode; the frame sharp quality block has an active electrode which is matched with the fixed electrode. The upper and lower bonding blocks and each bonding block connected with the fixed electrode use the electrostatic bonding to fix it on the glass base sheet. |