Application Number
申请号 |
02802632 |
Application Date
申请日 |
2002.08.12 |
| Title 名称 |
Resist pattern swelling material, and method for patterning using same
|
Publication Number
公开号 |
1802606 |
Publication Date
公开日 |
2006.07.12 |
| Approval Pub. Date |
|
Granted Pub. Date |
|
| International Classification 分类号 |
G03F7/00,G03F7/40,H01L21/027 |
Applicant(s) Name
申请人 |
Fujitsu Ltd. |
| Address 地址 |
|
| Inventor(s) Name 发明人 |
Nozaki Koji, Kozawa Miwa, Namiki Takahisa, Kon Junichi |
| Attorney & Agent 代理人 |
ren zonghua |
| |
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