The manufacture method for 13.5nm extreme ultraviolet filter comprises: 1) preparing an aluminum frame to attach the amorphous carbon film with thickness as 0.1~1m; 2) putting the frame into a vacuum coater vacuum plating a layer film of silicon single-crystal with thickness as 0.1~0.2m on said carbon film, and forming the product. Then, putting the filter into a vacuum chamber to let the normal line of the filter surface with silicon film form 85Deg glancing incidence angle with the extreme ultraviolet, filtering all the other extreme ultraviolet light with wavelength unequal to 13.5nm. This invention has transmission rate for 13.5nm extreme ultraviolet light as high as 70%. |