Original document(44 pages)  中文版
    Title: Plasma uniformity
Application Number
申请号		 200480014835 Application Date
申请日		 2004.03.26
Title 名称 Plasma uniformity
Publication Number
公开号		 1798864 Publication Date
公开日		 2006.07.05
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C23C16/00,C23F1/00,H01L21/00
Applicant(s) Name
申请人		 Mattson Tech Inc.
Address 地址
Inventor(s) Name 发明人 George Rene, Kadavanich Andreas, Devine Daniel J., Savas Stephen E., Zajac John
Attorney & Agent 代理人 wei xiaogang li xiaoshu

  
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