Original document(22 pages)  中文版
    Title: Uniformity correction system having light leak and shadow compensation
Application Number
申请号		 200510137796 Application Date
申请日		 2005.12.28
Title 名称 Uniformity correction system having light leak and shadow compensation
Publication Number
公开号		 1797218 Publication Date
公开日		 2006.07.05
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G03F7/20
Applicant(s) Name
申请人		 ASML Holding NV
Address 地址
Inventor(s) Name 发明人
Attorney & Agent 代理人 qin chen

  
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