| Original document(5 pages) 中文版 |
This invention relates to a preparation method for diamond-like nano-composite thin films by means of polymeric precursor pyrolysis. In this method, polycarbolic benzene is dissolved in organic solvents and ethyl orthosilicate is added. The mixed solution is spin coated to the surface of monocrystal silicon wafers and then processed at a high temperature so as to produce diamond-like nano-composite thin films. This technique has characteristics of simple raw material, convenient preparation process and deposition in large areas on complex substrates, and hopefully the thin films are widely applicable in the fields of mechanical engineering and friction. |
Application Number
申请号 |
200410010589 |
Application Date
申请日 |
2004.12.28 |
| Title 名称 |
Method for preparing Nano composite thin film of generic diamond by pyrolyzing precursor of polymer
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Publication Number
公开号 |
1796600 |
Publication Date
公开日 |
2006.07.05 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
C23C18/12,C23C18/04 |
Applicant(s) Name
申请人 |
Lanzhou Inst of Chemistry & Physics, C.A.S |
| Address 地址 |
730000 |
| Inventor(s) Name 发明人 |
Yang Shengrong, Xu Tao |
| Attorney & Agent 代理人 |
fang xiaojia |
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