Original document(16 pages)  中文版
    Title: Ion implanting apparatus and ion implanting method
Application Number
申请号		 200510098029 Application Date
申请日		 2002.12.10
Title 名称 Ion implanting apparatus and ion implanting method
Publication Number
公开号		 1794411 Publication Date
公开日		 2006.06.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01J37/317,H01L21/265
Applicant(s) Name
申请人		 Nissin Electric Co., Ltd.
Address 地址
Inventor(s) Name 发明人 Matsumoto Takao, Orihira Kohichi, Nakao Kazuhiro
Attorney & Agent 代理人 wei xiaogang li xiaoshu

  
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