Original document(7 pages)  中文版
    A micromechanical biochemical transducer of nanostructure is prepared as setting micro suspension C arm on SOI silicon base, coating silica insulation layer on said arm with its top layer being heating resistance prepared by single C crystal silicon, coating nanomaterial on heating resistance, connecting nanomaterial heating unit to heating resistance by leading wire, setting laser generator and transducer output signal detection unit of position sensitive detector above micro suspension C arm.
Application Number
申请号		 200510130477 Application Date
申请日		 2005.12.13
Title 名称 Nanometer structure micro mechanical biochemical sensor
Publication Number
公开号		 1793916 Publication Date
公开日		 2006.06.28
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G01N33/22,G01N25/54,G01N35/00,G01N5/02
Applicant(s) Name
申请人		 Tsinghua Univ.
Address 地址 100084
Inventor(s) Name 发明人 Wang Zheyao, Zhou Youzheng, Zhuang Zhiwei
Attorney & Agent 代理人 li guangsong

  
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