Original document(28 pages)  中文版
    Title: A method of fault detection in manufacturing equipment
Application Number
申请号		 200480013436 Application Date
申请日		 2004.05.03
Title 名称 A method of fault detection in manufacturing equipment
Publication Number
公开号		 1791971 Publication Date
公开日		 2006.06.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/3065,H01L21/66,H01L21/00,C23C16/458
Applicant(s) Name
申请人		 Scient Systems Res Ltd.
Address 地址
Inventor(s) Name 发明人 Hopkins Michael, Scanlan John, O'leary Kevin
Attorney & Agent 代理人 huang xiaolin wang zhisen

  
Plasma processing device
Method for fabricating a self-aligned bipolar transistor having increased manufacturabily and related structure
Use of voids between elements in semiconductor structures for isolation
Electrical connections in substrates
Semiconductor die package with increased thermal conduction
Thermal apparatus for engaging electronic device
Interconnection pattern design
Semiconductor chip mounting body and manufacturing method thereof
Method of forming resistive structures
Method for fabricating a self-aligned bipolar transistor with planarizing layer and related structure
Google
Note:All patent data come from State Intellectual Property Office of the People's Republic of China. If there were discrepancies between here and the State Intellectual Property office, the later is more accurate. The patent data is only for public exchange and learning purposes. We are not responsible for the adverse consequences with unverified use of the data.