Original document(7 pages)  中文版
    The invention discloses a SEM affirmation method of optical piece through FIB location optical piece, which makes two marks as the calibrated point of the first and second point find and affirm the defect. The invention improves the precision and efficiency, which saves time.
Application Number
申请号		 200410093007 Application Date
申请日		 2004.12.15
Title 名称 Method for affirming optical piece with scanning electron microscopy
Publication Number
公开号		 1789987 Publication Date
公开日		 2006.06.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 G01N21/84,G01N21/958
Applicant(s) Name
申请人		 Shanghai Huahong NEC Electronics Co., Ltd.
Address 地址 201206
Inventor(s) Name 发明人
Attorney & Agent 代理人 ding jitie

  
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