| Original document(11 pages) 中文版 |
The invention discloses a microstructure unidirectional bending fatigue test device, which is characterized by the following: the driving comb couple is set on one side of hung vibration block and the test comb couple is set to detect the vibration amplitude on the other side; the outside wall of driving and test comb couples is fixed on the silicon base through anchor fixing layer, which connects the driving electrode to generate periodic electrostatic force and test electrode of sensing circuit; the end of hung vibration block connects one end of sample to produce alternating stress; the other end connects the ground electrode; the sample integrates with the driving and detecting device; the driving electrode connects the output probe of power amplifier; the test electrode is leaded by probe to connect the input end of terminal control equipment after the probe is switched in the amplitude measuring circuit. The device adapts the research based on micronanometer technique on the MEMS system. |
Application Number
申请号 |
200510132114 |
Application Date
申请日 |
2005.12.16 |
| Title 名称 |
Apparatus for testing one-way flexural-tensile fatigue of microstructure
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Publication Number
公开号 |
1789960 |
Publication Date
公开日 |
2006.06.21 |
| Approval Pub. Date |
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Granted Pub. Date |
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| International Classification 分类号 |
G01N3/38 |
Applicant(s) Name
申请人 |
Beijing University of Technology |
| Address 地址 |
100022 |
| Inventor(s) Name 发明人 |
Ding Lei, Shang Deguang, Jia Guanhua, Sun Guoqin |
| Attorney & Agent 代理人 |
wei yuzhu |
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