Original document(16 pages)  中文版
    Title: Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
Application Number
申请号		 200510109615 Application Date
申请日		 2005.09.14
Title 名称 Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same
Publication Number
公开号		 1789295 Publication Date
公开日		 2006.06.21
Approval Pub. Date Granted Pub. Date
International Classification 分类号 C08F220/10,C09D133/04,G03F7/11
Applicant(s) Name
申请人		 Hynix Semiconductor Inc.
Address 地址
Inventor(s) Name 发明人 Jung Jae C., Bok Cheol K., Lim Chang M.
Attorney & Agent 代理人 zhang bengyuan zhao renlin

  
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