Original document(79 pages)  中文版
    Title: Method for manufacturing film integrated circuit and element substrate
Application Number
申请号		 200510091376 Application Date
申请日		 2005.06.29
Title 名称 Method for manufacturing film integrated circuit and element substrate
Publication Number
公开号		 1734750 Publication Date
公开日		 2006.02.15
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/84,H01L27/12,G06K19/077
Applicant(s) Name
申请人		 Semiconductor Energy Lab
Address 地址
Inventor(s) Name 发明人 Michimae Yoshitaka, tamura Tomoko, tsuruome Takuya
Attorney & Agent 代理人 zhang xuemei ye kaidong

  
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