Original document(73 pages)  中文版
    Title: Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus f
Application Number
申请号
200510091162 Application Date
申请日
2005.08.09
Title 名称 Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus f
Publication Number
公开号
1734714 Publication Date
公开日
2006.02.15
Approval Pub. Date Granted Pub. Date
International Classification 分类号 H01L21/00,H01L21/20,H01L21/324,H01L21/447,H01L21/268,H01L21/336,G02F1/00
Applicant(s) Name
申请人
Advanced LCD Technologies Dev
Address 地址
Inventor(s) Name 发明人 Ogawa Hiroyuki, Akita Noritaka, Taniguchi Yukio, Hiramatsu Masato, Jyumonji Masayuki
Attorney & Agent 代理人 wang yang

  
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