| Original document(73 pages) 中文版 |
Title: Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus f |
Application Number 申请号 |
200510091162 |
Application Date 申请日 |
2005.08.09 |
| Title 名称 |
Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus f
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Publication Number 公开号 |
1734714 |
Publication Date 公开日 |
2006.02.15 |
| Approval Pub. Date |
|
Granted Pub. Date |
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| International Classification 分类号 |
H01L21/00,H01L21/20,H01L21/324,H01L21/447,H01L21/268,H01L21/336,G02F1/00 |
Applicant(s) Name 申请人 |
Advanced LCD Technologies Dev |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Ogawa Hiroyuki, Akita Noritaka, Taniguchi Yukio, Hiramatsu Masato, Jyumonji Masayuki |
| Attorney & Agent 代理人 |
wang yang |
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