| Original document(29 pages) 中文版 |
A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity. |
Application Number
申请号 |
03803423 |
Application Date
申请日 |
2003.02.10 |
| Title 名称 |
Reactor assembly and processing method
|
Publication Number
公开号 |
1628368 |
Publication Date
公开日 |
2005.06.15 |
| Approval Pub. Date |
|
Granted Pub. Date |
|
| International Classification 分类号 |
H01L21/00,H01J37/32,C23C16/455,C23C16/50 |
Applicant(s) Name
申请人 |
Axcelis Tech Inc. |
| Address 地址 |
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| Inventor(s) Name 发明人 |
Kinnard David |
| Attorney & Agent 代理人 |
liao lingling yang songling |
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