Original document(88 pages) Authorized document(89 pages) 中文版
    A gas panel (10) includes a one-piece manifold body (118) having an inlet (100) and a lateral wall defining at least one active device station.
Application Number
申请号
98811585 Application Date
申请日
1998.10.28
Title 名称 Gas panel
Publication Number
公开号
1280657 Publication Date
公开日
2001.01.17
Approval Pub. Date 2003.04.09 Granted Pub. Date 2003.04.09
International Classification 分类号 F16K11/20
Applicant(s) Name
申请人
Unit Instruments, Inc.
Address 地址
Inventor(s) Name 发明人 Eric J. Redemann;Kim N. Vu
Attorney & Agent 代理人 cheng wei

  
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