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Patent:
1)
Heater and heating device with heaters
2)
Process for transfer of a thin layer formed in a substrate with vacancy clusters
3)
Semiconductor substrate forming method and formed semiconductor substrate
4)
Laser apparatus and manufacturing method of thin film transistor using the same
5)
Semiconductor structure and method for manufacturing semiconductor structure
6)
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
7)
Crystalline gallium nitride base compound growth method and semiconductor component containing gallium nitride base compound
8)
Epitaxial semiconductor substrate manufacturing method and semiconductor component production method
9)
Growth method for gallium nitride film using multi-hole gallium nitride as substrate
10)
Laser irradiation method and apparatus for forming a polycrystalline silicon film