|
Molecular formula: SIH2CL2
molecular weight: 101.01
CAS:
density: gas density 4.599g / L; Liquid relative density 1.42 (-122 ° C) melting point
: -122 ° C
Boiling Point: 8 .3 ° C
viscosity: .307 (7 ° C)
traits: under normal temperature and pressure is colorless gas, the market for the goods packed in containers of transparent colorless liquid (0.03 ~ 0.18 pressure).
purposes: mainly for the semiconductor epitaxial material; Chemical Vapor Deposition gas source.
preparation or sources: (a) silicon and hydrochloric acid vapor reaction; (2) silicon tetrachloride and formaldehyde reaction.
Note: in humid air can be hydrolyzed, and hydrogen chloride produced white smoke. With the formation of explosive mixtures of air, the explosive limit of 4.1% -98.8% (volume fraction). With the format reagent reacts.
Notice:Each item can have many explanations from different angels. If you want grasp the item comprehensively,please see below "more details data". |
Home Products Search Properties Search 中文版